Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence
In integrated circuit (IC) manufacturing, fast, nondestructive, and precise detection of defects
in patterned wafers, realized by bright-field microscopy, is one of the critical factors for …
in patterned wafers, realized by bright-field microscopy, is one of the critical factors for …
Assessing form-dependent optical scattering at vacuum-and extreme-ultraviolet wavelengths of nanostructures with two-dimensional periodicity
Form birefringence, where the orientation of periodic structures yields effective refractive-
index differences between orthogonal polarizations, is integral to multidimensional optical …
index differences between orthogonal polarizations, is integral to multidimensional optical …