US7479516B2 - Nanocomposites and methods thereto - Google Patents US7479516B2 -
Nanocomposites and methods thereto - Google Patents Nanocomposites and methods …

Embodiments of the present disclosure relate to advanced polishing pads with tunable
chemical, material and structural properties, and new methods of manufacturing the same …

Embodiments described herein relate to integrated abrasive (IA) polishing pads, and
methods of manufacturing IA polishing pads using, at least in part, surface functionalized …

(57) ABSTRACT A new, non-wrapping approach to Solubilize nanotubes. Such as carbon
nanotubes, in organic and inorganic solvents is provided. In accordance with certain …

BACKGROUND 0001. The present invention relates to methods and appa ratus for
monitoring a metal layer on a Substrate during electro-chemical mechanical polishing. 0002 …

A polishing article manufacturing system includes a feed section and a take-up section, the
take-up section comprising a supply roll having a polishing article disposed thereon for a …

4.228, 214. A 10/1980 Steigelman et al. 5.453, 106 A 9, 1995 Roberts........................... 5
1/307 4,229, 186 A 10, 1980 Wilson 5,454,343 A 10, 1995 Eun et al. 4,273,561 A 6, 1981 …

(51) Int. Cl.(57) ABSTRACT HOI. I./62(2006.01)-0 A binder material, inorganic polymer, is
used to formulate (52) US Cl........... 313495. 428/403: 445/50: 427/78 carbon nanotube …

CMP pad dressers having leveled tips and associated methods are provided. In one aspect,
for example, a CMP pad dresser can include a matrix layer and a monolayer of a plurality of …

(57) ABSTRACT A polishing pad has a polishing layer and a backing layer secured to the
polishing layer. The polishing layer has a polishing Surface, a first thickness, a first …