MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …

Series-resonant vibrating micromechanical resonator oscillators are demonstrated using a
custom-designed single-stage zero-phase-shift sustaining amplifier together with planar …

A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

Substantial reductions in vibrating micromechanical resonator series motional resistance R
x have been attained by mechanically coupling and exciting a parallel array of corner …

This work, the second of two parts, reports on the implementation and characterization of
high-quality factor (Q) side-supported single crystal silicon (SCS) disk resonators. The …

This work, the first of two parts, presents the design and modeling of VHF single-crystal
silicon (SCS) capacitive disk resonators operating in their elliptical bulk resonant mode. The …

Micromechanical RF filters and reference oscillators based on recently demonstrated
vibrating on-chip micromechanical resonators with Qs> 10,000 at 1.5 GHz, are described as …

This paper reports a novel micromachined gyroscope design that provides enhanced
decoupling of the drive and sense modes, and increased actuation and detection …

This paper reports on the design, implementation and characterization of high-frequency
single crystal silicon (SCS) block resonators with piezoelectric electromechanical …