High-k stacked dielectric structures were fabricated by a combination of RF magnetron sputtering and plasma-enhanced chemical vapor deposition. Their structural properties …
Ge-doped Al2O3 films were deposited on long, non-rotated quarts substrate by magnetron co-sputtering of Ge and Al2O3 space-apart targets. This approach allowed to vary Ge …
Charge-trapping memories such as SONOS and MONOS have attracted considerable attention as promising alternatives for next-generation flash memories due to dielectric …