Terahertz time-domain ellipsometry with high precision for the evaluation of GaN crystals with carrier densities up to 1020 cm−3

VC Agulto, T Iwamoto, H Kitahara, K Toya… - Scientific Reports, 2021 - nature.com
Gallium nitride (GaN) is one of the most technologically important semiconductors and a
fundamental component in many optoelectronic and power devices. Low-resistivity GaN …

Non-destructive mapping of electrical properties of semi-insulating compound semiconductor wafers using terahertz time-domain spectroscopy

K Muthuramalingam, WC Wang - Materials Science in Semiconductor …, 2024 - Elsevier
With an increasing demand for THz electronics applications, it is essential to obtain the
electrical properties of semiconductor materials used in their fabrication. This study presents …

Developments in terahertz ellipsometry: Portable spectroscopic quasi-optical ellipsometer-reflectometer and its applications

A Belyaeva, A Galuza, I Kolenov, S Mizrakhy - Journal of Infrared …, 2021 - Springer
The paper presents a new instrument—a portable spectroscopic quasi-optical (QO) THz
ellipsometer-reflectometer (SQOTER). It combines two independent experimental …

Characterization of electrical properties of β-Ga2O3 epilayer and bulk GaAs using terahertz time-domain ellipsometry

T Iwamoto, VC Agulto, S Liu, Y Wang… - Japanese Journal of …, 2023 - iopscience.iop.org
The electrical properties of beta-gallium oxide (β-Ga 2 O 3) and gallium arsenide
semiconductors were characterized using the emerging terahertz time-domain ellipsometry …

Non-Drude-Type Response of Photocarriers in Fe-Doped β-Ga2O3 Crystal

H Jiang, K Wang, H Murakami, M Tonouchi - Photonics, 2022 - mdpi.com
Beta gallium oxide, β-Ga2O3, is one of the promising ultrawide bandgap semiconductors
with a monoclinic (C2/m) β-phase structure showing strong anisotropic properties. To …

Investigation of Nondestructive and Noncontact Electrical Characterization of GaN Thin Film on ScAlMgO4 Substrate Using Terahertz Time‐Domain Spectroscopic …

H Watanabe, D Wang, T Fujii, T Iwamoto… - … status solidi (b), 2024 - Wiley Online Library
Semiconductor evaluation methods frequently require sample processing and carry the risk
of defects and property changes. Therefore, nondestructive and noncontact electrical …

Characterization of the electrical properties of an InN epilayer using terahertz time-domain spectroscopic ellipsometry

K Morino, S Arakawa, T Fujii, S Mouri… - Japanese Journal of …, 2019 - iopscience.iop.org
We demonstrate the measurement of electrical properties of InN layers grown by RF-MBE
using terahertz time-domain spectroscopic ellipsometry (THz-TDSE). Dependences of …

Structural evaluation of low-temperature-grown InGaAs crystals on (0 0 1) InP substrates

O Ueda, N Ikenaga, S Hirose, K Hirayama… - Journal of Crystal …, 2020 - Elsevier
Through transmission electron microscopy and related techniques, we performed structural
evaluation of low-temperature grown (LTG) InGaAs crystals on (0 0 1) InP substrates. These …

Evaluation for GaN single crystals with high doping concentration by the terahertz ellipsometry

M Nakajima, T Iwamoto, H Kitahara… - … Waves (IRMMW-THz …, 2020 - ieeexplore.ieee.org
Gallium nitride (GaN) single crystals with high carrier concentration up to 10 20 cm-3 order
were evaluated by the terahertz time-domain spectroscopic ellipsometry. The electric …

Resistivity Measurement of P+-Implanted 4H-SiC Samples Prepared at Different Implantation and Annealing Temperatures Using Terahertz Time-Domain …

K Ishiji, S Kawado, Y Hirai… - Materials Science Forum, 2020 - Trans Tech Publ
The resistivities of P+-implanted 4H-SiC samples, each prepared at different implantation
and annealing temperatures, were measured using terahertz time-domain spectroscopic …