This paper presents a new technique for ice detection using dielectric barrier discharge
(DBD) plasma actuator. The DBD ice sensor consists of a pair of electrodes and a test …

A novel design of the dielectric barrier discharge (DBD) actuator/sensor is proposed for
mapping the location of icing on a surface. The new design uses segmentation of the …

We have developed a highly sensitive electric-field sensor with novel comb-shaped
microelectrodes. The sensor is based on modulating an incident field with a grounded …

This paper proposes an electric field microsensor (EFM) with mutual shielding electrodes.
Based on the charge-induction principle, the EFM consists of fixed electrodes and …

This paper proposes a novel wafer-level vacuum packaged electric field microsensor (EFM)
featuring a high quality factor, low driving voltage, low noise, and low power consumption …

该文研制了一种新型的基于SOI (Silicon-On-Insulator) 微机械加工技术的高性能电场传感器
敏感结构. 为提高传感器的灵敏度和信噪比, 该器件采用侧面屏蔽感应电极的独特设计方案 …

A major concern in the development of three-dimensional (3D) microelectromechanical
system electric field sensors (EFSs) is space charge interference. With space charges in the …

This article proposes a single-chip 3-D electric field microsensor (3-D EFM) with
piezoelectric excitation to reduce the excitation voltage and crosstalk noise and improve the …

This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic
field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as …

To analyze and design the detecting structure of electrostatic inductive electric field sensors,
it is crucial to determine the capacitance. This study proposes a model for the theoretical …