Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression

C Zuo, C Yun, CS Lo, J Kim - US Patent 8,816,567, 2014 - Google Patents
CPC....... 2Hell,". 55. 9, Hell" ing a piezoelectric material is disposed between the first con
99.9): O1): E; 9/1 73 26. O1 ductive layer and the second conductive layer. One or more …

One port contour-mode ZnO piezoelectric MEMS resonator

T Gryba, J Carlier, S Wang, XZ Zhao, S Guo… - Microelectronic …, 2011 - Elsevier
This paper reports on design, fabrication and experimental testing of one port ZnO contour-
mode resonant MEMS. The devices are fabricated from silicon wafers using a 4-mask …

Super high frequency width extensional aluminum nitride (AlN) MEMS resonators

KE Wojciechowski, RH Olsson… - 2009 IEEE …, 2009 - ieeexplore.ieee.org
Width extensional (WE) super high frequency (SHF) aluminum nitride (AlN) resonators have
been fabricated using optical lithography. Solidly anchored WE resonators were shown to …

RF MEMS: Focusing on the next step

T Oita - 2009 IEEE International Ultrasonics Symposium, 2009 - ieeexplore.ieee.org
Radio frequency and mixed signal semiconductor technologies have been improving and
play a big role in the rapidly growing market of wireless communication. Higher integration …

Modeling of MEMS resonator piezoelectric disc by means of an equicharge current source method

L Elmaimouni, FE Ratolojanahary, JE Lefebvre, JG Yu… - Ultrasonics, 2013 - Elsevier
The Legendre polynomial method has been extended to the modeling of MEMS resonator
disc with current excitation (equicharge current source). Formulation is given that allows the …

Resonator with a staggered electrode configuration

CH Yun, C Zuo, J Kim, MF Velez, DD Kim… - US Patent …, 2016 - Google Patents
An integrated circuit device includes a piezoelectric substrate having a first surface and a
second surface opposite the first surface. The device also includes a first electrode and a …

ZnO contour-mode resonator

T Gryba, J Carlier, S Wang, X Zhao, S Guo… - … Congrès Français d' …, 2010 - hal.science
Résumé This paper reports on design, fabrication and experimental testing of one port ZnO
piezoelectric contour-mode MEMS resonator. This is a rectangular plate formed by ZnO …

[PDF][PDF] ZnO and KNbO3 contour-mode resonators

T Gryba, J Carlier, L Elmaimouni… - … on Acoustics, Salé, 2010 - researchgate.net
This paper reports on design and fabrication of one port ZnO and KNbO3 piezoelectric
contour-mode MEMS resonators on Si substrate. The resonator is made up of a rectangular …

PZT-on-silicon RF-MEMS Lamb wave resonators and filters

H Yagubizade - 2013 - research.utwente.nl
Lamb-wave piezoelectric RF-MEMS resonators have demonstrated promising performance,
such as low motional impedance and high Q-factor. Lamb-wave resonators are still in the …

[图书][B] Micromachined Acoustic Programmable Tunable Finite Impulse Response (FIR) Filters for Microwave Applications

A Galinde - 2013 - search.proquest.com
This dissertation proposes a miniature FIR filter that works at microwave frequencies, whose
filter response can ideally be digitally programmed. Such a frequency agile device can find …