The recent development of the Internet of Things (IoT) in healthcare and indoor air quality
monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based …

Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered
one of the fastest-growing, interdisciplinary high technologies during the post-Moore era …

Micromachined silicon platforms, owing to some of its inherent advantages including
miniaturized dimensions, ultralow power consumption, reduced batch fabrication cost, long …

Semiconducting metal oxide (SMO) gas sensors typically operate at a few hundred degrees
Celsius and consume hundreds of milliwatts of power, limiting their application in battery …

A central quest in optics is to rapidly extract quantitative information from a sample. Existing
topographical imaging tools allow non-contact and three-dimensional measurements at the …

This paper is concerned with the design, fabrication, and characterization of novel high-
temperature silicon on insulator (SOI) microhotplates employing tungsten resistive heaters …

Presented is nano-size effect of ZnO nanowires (NWs) on sensitivity of hydrogen sulfide (H 2
S) detection in ambient atmosphere. The sensing mechanism of ZnO NWs for H 2 S …

In this paper, the research status of low power micro hot plate gas sensor is reviewed. This
type of sensor is characterized by the combination of MEMS technology and related …

Microelectromechanical systems (MEMS)-based sample carriers became a breakthrough for
in situ inspection techniques, especially in transmission electron microscopy where the …

US PATENT DOCUMENTS having one or more of chambers. Each chamber is partitioned
from the other chambers by physical gates or fluidic curtains. A controller coordinates …