KS Zhuravlev, IV Osinnykh, DY Protasov… - … status solidi c, 2013 - Wiley Online Library
Abstract The Alx Ga1–xN layers with a wide range of AlN molar fraction (0< x< 0.6) were
grown by ammonia MBE on (0001)‐oriented sapphire substrates using silane as the silicon …