ION-X dopant gas delivery system performance characterization at axcelis
The performance of ION-X delivering arsine (AsH 3), phosphine (PH 3), and boron trifluoride
(BF 3) was evaluated at the Axcelis Advanced Technology Center. ION-X is a sub …
(BF 3) was evaluated at the Axcelis Advanced Technology Center. ION-X is a sub …
Improving safety in dopant gas delivery systems
J Arnó, MH Weston - MRS Advances, 2022 - Springer
Dopant gases used in ion implantation are poisonous and flammable (hydrides) and toxic
and corrosive (fluorides). In the last 20 years, Safe Gas Delivery Systems were developed to …
and corrosive (fluorides). In the last 20 years, Safe Gas Delivery Systems were developed to …
[PDF][PDF] Development of nanocomposite materials for hydrogen storage
F Peru - 2022 - pergamos.lib.uoa.gr
Borohydrides are considered good candidates for low-pressure solid state hydrogen
storage, as they have very high hydrogen content. However their high stability and …
storage, as they have very high hydrogen content. However their high stability and …
Evaluation of ION-X® Hydride Dopant Gas Sources on a Varian VIISion High Current Implanter
K Kerkel, J Arnó, G Reichl, J Feicht… - … Conference on Ion …, 2018 - ieeexplore.ieee.org
ION-X is a sub-atmospheric gas storage and delivery system that uses metal-organic-
framework (MOF) adsorbents to safely store and deliver ion implant dopant gases. MOFs are …
framework (MOF) adsorbents to safely store and deliver ion implant dopant gases. MOFs are …
[HTML][HTML] Next generation dopant gas delivery system for ion implant applications
Metal-Organic Framework (MOF) materials are a new class of crystalline adsorbents with
broad applicability in electronics materials storage, delivery, purification, and abatement …
broad applicability in electronics materials storage, delivery, purification, and abatement …