Three-dimensional confocal reflectance microscopy for surface metrology
CS Kim, H Yoo - Measurement Science and Technology, 2021 - iopscience.iop.org
Confocal microscopy uses a confocal aperture in front of a detector to eliminate out-of-focus
blur, providing optical sectioning, high spatial resolution, and high contrast. It enables …
blur, providing optical sectioning, high spatial resolution, and high contrast. It enables …
[PDF][PDF] 三维表面形貌测量中的共聚焦显微成像技术研究进展
王玥颖， 刘旭， 郝翔 - Laser & Optoelectronics Progress, 2023 - researching.cn
摘要随着精密仪器制造和半导体加工产业的蓬勃发展, 对微小结构表面形貌的观察和测量是现代
科学研究的一个重要方向. 激光扫描共聚焦显微成像技术因高分辨率, 高信噪比和优秀的层切 …
科学研究的一个重要方向. 激光扫描共聚焦显微成像技术因高分辨率, 高信噪比和优秀的层切 …
Scan-less confocal phase imaging based on dual-comb microscopy
E Hase, T Minamikawa, T Mizuno, S Miyamoto… - Optica, 2018 - opg.optica.org
Confocal laser microscopy (CLM) is a powerful tool in life science research and industrial
inspection because it offers two-dimensional optical sectioning or three-dimensional …
inspection because it offers two-dimensional optical sectioning or three-dimensional …
Smartphone confocal microscopy for imaging cellular structures in human skin in vivo
We report development of a low-cost smartphone confocal microscope and its first
demonstration of in vivo human skin imaging. The smartphone confocal microscope uses a …
demonstration of in vivo human skin imaging. The smartphone confocal microscope uses a …
High-speed 3-D measurement with a large field of view based on direct-view confocal microscope with an electrically tunable lens
We propose a new structure of confocal imaging system based on a direct-view confocal
microscope (DVCM) with an electrically tunable lens (ETL). Since it has no mechanical …
microscope (DVCM) with an electrically tunable lens (ETL). Since it has no mechanical …
Accurate and efficient height extraction in chromatic confocal microscopy using corrected fitting of the differential signal
Accurate and efficient peak extraction algorithm is essential in real-time chromatic confocal
measurement. However, current state-of-art algorithms cannot simultaneously satisfy the …
measurement. However, current state-of-art algorithms cannot simultaneously satisfy the …
High-speed reflectance confocal microscopy using speckle modulation
We developed a spectrally-encoded, line reflectance confocal microscope (RCM) that uses
a rotating diffuser to rapidly modulate the illumination speckle pattern. The speckle …
a rotating diffuser to rapidly modulate the illumination speckle pattern. The speckle …
Area scanning method for 3D surface profilometry based on an adaptive confocal microscope
Conventional confocal 3D microscopes suffer from a slow measurement speed due to its
requirement of scanning in three directions. Although lateral slit scanning has been proven …
requirement of scanning in three directions. Although lateral slit scanning has been proven …
Low-cost, high-speed near infrared reflectance confocal microscope
We have developed a low-cost, near-infrared (NIR) reflectance confocal microscope (RCM)
to overcome challenges in the imaging depth and speed found in our previously-reported …
to overcome challenges in the imaging depth and speed found in our previously-reported …
In-fiber illumination-detection-synchronized confocal microscopy for high-precision fast axial scanning
Confocal microscopy remains a major workhorse in the 3D surface topography
measurement owing to its reliability and compatibility for workpieces with various …
measurement owing to its reliability and compatibility for workpieces with various …