This review paper covers a topic of significant importance in micro-and nano-systems
development and manufacturing, specifically the residual stresses in deposited thin-film …

Micro-electromechenical Systems (MEMS) gyroscope is widely used in many occasions to
measure the angular speed of the moving objects and attracts the attentions of many …

This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

Completely glassy thin films of Zr–Al–Cu–Ni exhibiting a large supercooled liquid region (ΔT
x= 95 K), very smooth surface (R a= 0.2 nm) and high value of Vickers hardness (H v= 940) …

Mechanical devices are being introduced whose size scale is well below that of
conventional mechanical test specimens. The smallest devices have sizes in the nanometer …

The continuous miniaturization of modern electromechanical systems calls for a
comprehensive understanding of the mechanical properties of metallic materials specific to …

The growth stress generated once grains coalesce in Volmer-Weber-type thin films is
investigated by time-multiscale simulations comprising complementary modules of (i) finite …

Charge injection and retention in thin dielectric layers remain critical issues for the reliability
of many electronic devices because of their association with a large number of failure …

Time-dependent mechanical investigations of on-wafer specimens are of interest for
improving the reliability of thin metal film microdevices. This paper presents a novel …

Abstract High strength Ni matrix TiO 2 composites are prepared by co-electrodeposition with
an electrolyte composed of Ni Watts bath, surfactants, CO 2 in the supercritical fluid state …