Metalorganic precursors for vapour phase epitaxy

AC Jones - Journal of crystal growth, 1993 - Elsevier
Metalorganic compounds are finding an increasing application in the growth of III–V and II–
VI semiconductor layers by metalorganic vapour phase epitaxy (MOVPE) and chemical …

Role of surface chemistry in semiconductor thin film processing

JG Ekerdt, YM Sun, A Szabo, GJ Szulczewski… - Chemical …, 1996 - ACS Publications
Microelectronics plays a major role in a host of late twentieth century technologies.
Everywhere you look, microprocessors seem to be present. Taking the venerable …

Growth of GaAs nanowires on Si substrates using a molecular beam epitaxy

SG Ihn, JI Song, YH Kim, JY Lee… - IEEE transactions on …, 2007 - ieeexplore.ieee.org
Au-catalyzed GaAs nanowires were grown on Si substrates by vapor-liquid-solid growth
method using a molecular beam epitaxy (MBE). The MBE growth could produce controlled …

Fundamental aspects of organometallic vapor phase epitaxy

GB Stringfellow - Materials Science and Engineering: B, 2001 - Elsevier
This review discusses new developments in our attempts to understand the fundamental
aspects of organometallic vapor phase epitaxy (OMVPE), a process now widely used in the …

Electrical and optical properties of carbon-doped GaSb

RD Wiersma, JAH Stotz, OJ Pitts, CX Wang… - Physical Review B, 2003 - APS
We report low-temperature Hall-effect and photoluminescence measurements on samples of
GaSb lightly doped with carbon in the range of 10 16–5× 10 17 cm− 3. Temperature …

Controlled intrinsic carbon doping in MOVPE-grown GaAs layers by using TMGa and TBAs

M Longo, R Magnanini, A Parisini, L Tarricone… - Journal of crystal …, 2003 - Elsevier
Homoepitaxial GaAs layers were grown by low-pressure metalorganic vapor phase epitaxy
(MOVPE), by using the metalorganic precursors trimethylgallium (TMGa) and the low …

Wurtzite Gallium Phosphide via Chemical Beam Epitaxy: Impurity-Related Luminescence vs Growth Conditions

BC da Silva, ODD Couto Jr, H Obata, CA Senna… - ACS …, 2022 - ACS Publications
The metastable wurtzite crystal phase in gallium phosphide (WZ GaP) is a relatively new
structure with little available information about its emission properties compared to the most …

Novel precursors for organometallic vapor phase epitaxy

GB Stringfellow - Journal of crystal growth, 1993 - Elsevier
During the development of organometallic vapor phase epitaxy (OMVPE) for the growth of
III/V semiconductor materials, the choice of group III and group V source molecules has …

Surface reactions of dimethylaminoarsine during MOMBE of GaAs

S Salim, JP Lu, KF Jensen, DA Bohling - Journal of crystal growth, 1992 - Elsevier
We present in-situ mass spectroscopy studies of surface reactions of dimethylaminoarsine
and tertiarybutylarsine under metalorganic molecular beam epitaxy conditions. The results …

Comparison of gallium and arsenic precursors for GaAs carbon doping by organometallic vapor phase epitaxy using CCl4

WS Hobson, SJ Pearton, DM Kozuch… - Applied Physics …, 1992 - pubs.aip.org
The carbon doping properties of GaAs grown by low pressure (30 Torr) organometallic
vapor phase epitaxy at 520–700° C with CCl4 as the dopant precursor were compared for …