A survey of run-to-run control for batch processes
Abstract Run-to-run (R2R) control is widely used in semiconductor manufacturing systems to
minimize the process drift, shift and variability. The R2R controller adjusts control actions or …
minimize the process drift, shift and variability. The R2R controller adjusts control actions or …
Overlay error compensation using advanced process control with dynamically adjusted proportional-integral R2R controller
As semiconductor manufacturing reaching nanotechnology, to obtain high resolution and
alignment accuracy via minimizing overlay errors within the tolerance is crucial. To address …
alignment accuracy via minimizing overlay errors within the tolerance is crucial. To address …
Adaptive weight tuning of EWMA controller via model-free deep reinforcement learning
Z Ma, T Pan - IEEE Transactions on Semiconductor …, 2022 - ieeexplore.ieee.org
Exponentially weighted moving average (EWMA) controllers have been extensively studied
for run-to-run (RtR) control in semiconductor manufacturing processes. However, the EWMA …
for run-to-run (RtR) control in semiconductor manufacturing processes. However, the EWMA …
A processing quality prognostics scheme for plasma sputtering in TFT-LCD manufacturing
A novel quality prognostics scheme (QPS) for plasma sputtering in TFT-LCD manufacturing
processes is proposed. The QPS consists of a conjecture model and a prediction model. The …
processes is proposed. The QPS consists of a conjecture model and a prediction model. The …
Gaussian process regression for virtual metrology-enabled run-to-run control in semiconductor manufacturing
Incorporating virtual metrology (VM) into run-to-run (R2R) control enables the benefits of
R2R control to be maintained while avoiding the negative cost and cycle time impacts of …
R2R control to be maintained while avoiding the negative cost and cycle time impacts of …
Run-to-run control of batch production process in manufacturing systems based on online measurement
D Huang, J Lv - Computers & Industrial Engineering, 2020 - Elsevier
Run-to-run control is an important and effective method for quality control of batch
production process in manufacturing systems. Most of current run-to-run control methods are …
production process in manufacturing systems. Most of current run-to-run control methods are …
Reinforcement learning for process control with application in semiconductor manufacturing
Process control is widely discussed in the manufacturing process, especially in
semiconductor manufacturing. Due to unavoidable disturbances in manufacturing, different …
semiconductor manufacturing. Due to unavoidable disturbances in manufacturing, different …
MFRL-BI: Design of a model-free reinforcement learning process control scheme by using Bayesian inference
Abstract Design of the process control scheme is critical for quality assurance to reduce
variations in manufacturing systems. Taking semiconductor manufacturing as an example …
variations in manufacturing systems. Taking semiconductor manufacturing as an example …
Stochastic control of multilayer overlay in lithography processes
Y Jiao, D Djurdjanovic - IEEE transactions on semiconductor …, 2011 - ieeexplore.ieee.org
The multilayer overlay lithography process is one of the most important steps in
semiconductor manufacturing. It is a multistage manufacturing process in which errors are …
semiconductor manufacturing. It is a multistage manufacturing process in which errors are …
Run-to-run process adjustment using categorical observations
When quality characteristics cannot be measured on a continuous scale due to either
inherent or outside constraints, qualitative observations can be collected alternatively. Under …
inherent or outside constraints, qualitative observations can be collected alternatively. Under …