This paper proposes a novel self-sensing control concept for resonant MEMS mirrors solely
based on the comb-drive current generated by the mirror movement and simple circuitry …

Micro scanning mirrors (MSMs) extend the range and field of view of LiDARs, medical
imaging devices, and laser projectors. However, a new class of soft-hinged MSMs contains …

The angular motion of quasi-static micromirrors used for raster scanning projection
applications is typically affected by undesired oscillations related to high-frequency resonant …

Position feedback and closed loop control are very important for MEMS mirror owing to the
fact that the amplitude-frequency response of MEMS mirror is very susceptible to ambient …

The potential of driver assistance systems or automated driving to avoid accidents and
saving lives led to an increased demand on miniaturized low-cost optical scanning systems …

Embodiments of the disclosure provide systems and methods for detecting a resonant
frequency of an optical beam-steering device. The method may include driving the optical …