MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore,
have been widely used in the fields of consumer electronics, industry, health, defence, and …

This paper presents an angular-acceleration sensor that works as either an angular
accelerometer or a gravity gradiometer and is based on the micro electromechanical system …

Gradiometry is a multidisciplinary area that combines theoretical and applied physics, ultra-
low noise electronics, precision engineering, and advanced signal processing. Applications …

Lower stiffness can improve the performance of capacitive-based microelectromechanical
systems sensors. In this paper, softened beams, achieved by the electrostatic assembly …

A subnano-g electrostatic force-rebalanced flexure accelerometer is designed for the
rotating accelerometer gravity gradient instrument. This accelerometer has a large proof …

Gravity measurement can realize the detection of matter based on density characteristics,
and has been paid attention to in geophysics, physics, engineering and other fields. In this …

The reduction of temperature effect is vitally important for high precision sensors. This paper
introduces the theoretical analysis and experimental verification of an in-situ compensation …

Encoder-like micro area-changed capacitive transducers are advantageous in terms of their
better linearity and larger dynamic range compared to gap-changed capacitive transducers …

The first analytical evaluation of a free-hinged-hinged-hinged-free beam proposed for use
as the primary sensing element of a new gravity gradiometer is presented. Results of the …

На основании анализа открытых литературных источников рассматриваются
основные этапы создания гравитационных градиентометров для измерений …