Manufacturing processes that can create extremely small machines have been developed in
recent years. Microelectromechanical systems (MEMS) refer to devices that have …

Why write another book on mechanics? There are, after all, a number of excellent texts that
describe in great detail the way classical solids behave when acted upon by static and time …

Bulk silicon etching techniques, used to selectively remove silicon from substrates, have
been broadly applied in the fabrication of micromachined sensors, actuators, and structures …

The etch rates for 317 combinations of 16 materials (single-crystal silicon, doped, and
undoped polysilicon, several types of silicon dioxide, stoichiometric and silicon-rich silicon …

Surface micromachining is characterized by the fabrication of micromechanical structures
from deposited thin films. Originally employed for integrated circuits, films composed of …

Electrostatically actuated microstructures with high-aspect-ratio laminated-beam
suspensions have been fabricated using a 0.8 μm three-metal CMOS process followed by a …

Over the years, the fundamentals of VLSI technology have evolved to include a wide range
of topics and a broad range of practices. To encompass such a vast amount of knowledge …

We present a suspended-tube chemical reactor/heat exchanger for high-temperature fuel
processing in micro energy conversion systems, primarily for hydrogen production in …

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does
The MEMS Handbook. The field has changed so much that this Second Edition is now …

Xenon difluoride is a gas phase, room temperature, isotropic silicon etchant with extremely
high selectivity to many materials commonly used in microelectromechancial systems …