Comparison of CrN coatings prepared using high-power impulse magnetron sputtering and direct current magnetron sputtering

H Bai, J Li, J Gao, J Ni, Y Bai, J Jian, L Zhao, B Bai… - Materials, 2023 - mdpi.com
Chromium Nitride (CrN) coatings have widespread utilization across numerous industrial
applications, primarily attributed to their excellent properties. Among the different methods …

Foundations of physical vapor deposition with plasma assistance

JT Gudmundsson, A Anders… - … Sources Science and …, 2022 - iopscience.iop.org
Physical vapor deposition (PVD) refers to the removal of atoms from a solid or a liquid by
physical means, followed by deposition of those atoms on a nearby surface to form a thin …

[HTML][HTML] Ionization region model of high power impulse magnetron sputtering of copper

JT Gudmundsson, J Fischer, BP Hinriksson… - Surface and Coatings …, 2022 - Elsevier
The ionization region model (IRM) is applied to model high power impulse magnetron
sputtering (HiPIMS) discharges with a Cu target. We apply the model to three discharges …

Pulse length selection in bipolar HiPIMS for high deposition rate of smooth, hard amorphous carbon films

R Ganesan, I Fernandez-Martinez, B Akhavan… - Surface and Coatings …, 2023 - Elsevier
Amorphous carbon films were deposited by bipolar HiPIMS, as a function of negative and
positive voltage pulse lengths (50-175 μs and 0-175 μs respectively), using argon as sputter …

[HTML][HTML] Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges

M Renner, J Fischer, H Hajihoseini… - Journal of Vacuum …, 2023 - pubs.aip.org
The angular dependence of the deposition rates due to ions and neutrals in high-power
impulse magnetron sputtering (HiPIMS) discharges with a titanium target were determined …

[HTML][HTML] Industrial application potential of high power impulse magnetron sputtering for wear and corrosion protection coatings

J Vetter, T Shimizu, D Kurapov, T Sasaki… - Journal of Applied …, 2023 - pubs.aip.org
PVD technologies, including vacuum arc evaporation and DC-magnetron sputtering, have
been utilized in industrial settings since the early 1980s for depositing protective coatings …

Insights into the copper HiPIMS discharge: deposition rate and ionised flux fraction

J Fischer, M Renner, JT Gudmundsson… - Plasma Sources …, 2023 - iopscience.iop.org
The influence of pulse length, working gas pressure, and peak discharge current density on
the deposition rate and ionised flux fraction in high power impulse magnetron sputtering …

Short-pulse high-power dual magnetron sputtering

VO Oskirko, AN Zakharov, VA Semenov, AP Pavlov… - Vacuum, 2022 - Elsevier
Three experiments on a dual magnetron sputtering system capable of providing a pulse
power density of> 1 kW/cm 2, pulse repetition frequency of> 10 4 Hz, and pulse duration of> …

[HTML][HTML] Influence of HiPIMS pulse widths on the deposition behaviour and properties of CuAgZr compositionally graded films

L Lapeyre, K Wieczerzak, C Hain, J Metzger… - Surface and Coatings …, 2022 - Elsevier
In this work, the influence of different pulse widths (25, 50 and 100 μs) during high power
impulse magnetron sputtering (HiPIMS) of copper, silver and zirconium was investigated in …

[HTML][HTML] Evolution of microstructure and properties of TiNbCrAlHfN films grown by unipolar and bipolar high-power impulse magnetron co-sputtering: The role of …

H Du, R Shu, R Boyd, A Le Febvrier… - Surface and Coatings …, 2023 - Elsevier
Growth temperature (T s) and ion irradiation energy (E i) are important factors that influence
film growth as well as their properties. In this study, we investigate the evolution of crystal …