Research progress in the postprocessing and application of GaN crystal

Q Li, J Yu, S Wang, G Wang, G Liu, L Liu, S Zhang… - …, 2023 - pubs.rsc.org
As a typical representative of the third-generation semiconductor materials, GaN is an ideal
substrate for the fabrication of blue-green lasers, RF microwave devices, and power …

Vertical GaN Schottky barrier diode with record low contact resistivity on N-polarity using ultrathin ITO interfacial layer

X Liu, H Wang, J Wu, P Zou, Y Tu… - … on Electron Devices, 2023 - ieeexplore.ieee.org
In this article, an ohmic contact structure based on indium tin oxide (ITO)/Ti/Al/Ni/Au is
explored for high-performance GaN-on-GaN Schottky barrier diode (SBD) for the first time …

Vertical GaN Schottky barrier diodes with ohmic contact on N-polar by the atomic layer deposition of aluminum oxide interfacial layer

Y Yang, Z Ma, Z Jiang, B Li, L Gao, S Li, Q Lin… - Applied Surface …, 2025 - Elsevier
In this paper, high-performance vertical GaN on GaN Schottky Barrier Diodes (SBDs) on 2-
inch free-standing (FS)-GaN is presented with the specific on-state resistance (R on) of 1.34 …

Optimization of non-alloyed backside ohmic contacts to N-face GaN for fully vertical GaN-on-silicon-based power devices

Y Hamdaoui, SST Vandenbroucke, S Michler… - …, 2024 - pmc.ncbi.nlm.nih.gov
In the framework of fully vertical GaN-on-Silicon device technology development, we report
on the optimization of non-alloyed ohmic contacts on the N-polar n+-doped GaN face …

Low‐Resistivity Ti/Al/TiN/Au Ohmic Contacts to Ga‐and N‐Face n‐GaN for Vertical Power Devices

O Sadowski, M Kamiński, A Taube… - … status solidi (a), 2024 - Wiley Online Library
Low‐resistivity Ohmic contacts to Gallium‐face (G‐aface) and/or Nitrogen‐face (‐Nface) n‐
GaN are undoubtedly needed for high‐quality vertical power devices. Contrary to Ga‐face n …

Improvement of Ti/Al ohmic contacts on N-face n-type GaN by using O2 plasma treatment

H Seo, YJ Cha, ABMH Islam, JS Kwak - Applied Surface Science, 2020 - Elsevier
The effect of O 2 plasma treatment on the electrical properties of Ti/Al (20/200 nm) contact to
N (Nitrogen)-face n-GaN of vertical light-emitting diodes (VLEDs) has been investigated by …

A new approach to N-polar n-GaN surface treatment for room-temperature transparent ohmic contact formation

A Wójcicka, Z Fogarassy, T Kravchuk… - Materials Science in …, 2025 - Elsevier
In this work, we propose a new approach to obtain as-deposited low-resistivity transparent
ZnO: Al (AZO) ohmic contacts to n-GaN N-face by first modifying the GaN surface by …

Effect of surface stoichiometry on the non-alloyed ohmic contact to N-face n-GaN

R Zhou, M Feng, J Wang, Y Zhong, Q Sun, J Liu… - Solid-State …, 2020 - Elsevier
This letter reports a systematic study about the effect of surface stoichiometry induced by
inductively coupled plasma (ICP) etching on the ohmic contact to N-face n-GaN. It is found …

HVPE growth of bulk GaN with high conductivity for vertical devices

S Xia, Y Zhang, J Wang, J Chen… - … Science and Technology, 2020 - iopscience.iop.org
The electrical properties of gallium nitride (GaN) substrate are crucial to the performance of
vertical power devices. Bulk GaN substrates with carrier concentrations in the range from …

[图书][B] Optimierung der Prozesstechnologie und Steigerung der Zuverlässigkeit und Lebensdauer von (InAlGa) N-basierten Halbleiterlaserdioden

E Freier - 2022 - books.google.com
In der vorliegenden Arbeit werden Aspekte der Chipprozessierung untersucht, die die
Zuverlässigkeit von (InAlGa) N-basierten Rippenwellenleiterlaserdioden beeinflussen. Als …