Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

Atomic layer deposition—Sequential self-limiting surface reactions for advanced catalyst “bottom-up” synthesis

J Lu, JW Elam, PC Stair - Surface Science Reports, 2016 - Elsevier
Catalyst synthesis with precise control over the structure of catalytic active sites at the atomic
level is of essential importance for the scientific understanding of reaction mechanisms and …

Nickel oxide thin films grown by chemical deposition techniques: Potential and challenges in next‐generation rigid and flexible device applications

M Napari, TN Huq, RLZ Hoye, JL MacManus‐Driscoll - InfoMat, 2021 - Wiley Online Library
Nickel oxide (NiO x), ap‐type oxide semiconductor, has gained significant attention due to its
versatile and tunable properties. It has become one of the critical materials in wide range of …

Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks

CS Park, VR Shrestha, W Yue, S Gao, SS Lee… - Scientific reports, 2017 - nature.com
It is advantageous to construct a dielectric metasurface in silicon due to its compatibility with
cost-effective, mature processes for complementary metal-oxide-semiconductor devices …

Atomic layer deposition of NiO to produce active material for thin-film lithium-ion batteries

Y Koshtyal, D Nazarov, I Ezhov, I Mitrofanov, A Kim… - Coatings, 2019 - mdpi.com
Atomic layer deposition (ALD) provides a promising route for depositing uniform thin-film
electrodes for Li-ion batteries. In this work, bis (methylcyclopentadienyl) nickel (II)(Ni (MeCp) …

Structural color filters based on an all-dielectric metasurface exploiting silicon-rich silicon nitride nanodisks

CS Park, I Koirala, S Gao, VR Shrestha, SS Lee… - Optics …, 2019 - opg.optica.org
An all-dielectric metasurface is deemed to serve a potential platform to demonstrate spectral
filters. Silicon-rich silicon nitride (SRN), which contains a relatively large portion of silicon …

Atomic layer deposition of p‐type semiconducting thin films: a review

TS Tripathi, M Karppinen - Advanced Materials Interfaces, 2017 - Wiley Online Library
Semiconductors such as elemental silicon allowing both p‐type and n‐type doping are the
backbone of the current microelectronics industry, while the continuous progress in …

Non-iridescent transmissive structural color filter featuring highly efficient transmission and high excitation purity

VR Shrestha, SS Lee, ES Kim, DY Choi - Scientific reports, 2014 - nature.com
Nanostructure based color filtering has been considered an attractive replacement for
current colorant pigmentation in the display technologies, in view of its increased …

Atomic Layer Deposition of Transparent p-Type Semiconducting Nickel Oxide Using Ni(tBu2DAD)2 and Ozone

KEK Holden, CL Dezelah… - ACS applied materials & …, 2019 - ACS Publications
A novel atomic layer deposition (ALD) process for nickel oxide (NiO) is developed using a
recently reported diazadienyl complex, Ni (t Bu2DAD) 2, and ozone. A window of constant …

Atomic Layer Deposition of NiO by the Ni(thd)2/H2O Precursor Combination

E Lindahl, M Ottosson… - Chemical Vapor Deposition, 2009 - Wiley Online Library
Polycrystalline nickel oxide is deposited on SiO2 substrates by alternating pulses of bis (2, 2,
6, 6‐tetramethylheptane‐3, 5‐dionato) nickel (II)(Ni (thd) 2) and H2O. The deposition …