As a noncontact strategy with flexible tools and high efficiency, laser precision engineering
is a significant advanced processing way for high-quality micro-/nanostructure fabrication …

Abstract Ultrafast UV photodetectors (UV PDs) are crucial components in modern
optoelectronics because conventional detectors have reached a bottleneck with low …

The surface texturing of ceramics is generally performed through acid-based etching and
machining; however, laser texturing may be considered as a more precise, reproducible and …

A multifunctional silicon carbide (6H–SiC) material with efficient wicking and evaporative
cooling performances in a temperature range of 23–180° C is created through hierarchical …

Femtosecond (fs) laser, as an efficient and precise microfabrication tool, has been widely
used in material processing. Superhydrophobic surfaces have many applications in anti …

SiC, as one typical 3rd generation semiconductor, has high potential to be used as the
substrate for harsh environment sensors. However, the etching of this material is still …

Silicon carbide (SiC) is an attractive semiconductor material for devices that operate under
extreme conditions. However, its high hardness and chemical stability hinder …

The processing, particularly, etching of brittle, hard, and anti-corrosion materials represented
by the third-generation wide bandgap semiconductor silicon carbide (SiC), is a significant …

Silicon carbide (SiC) presents excellent semiconductor and physicochemical properties. The
fabrication of through-holes in SiC and SiC matrix composites is beneficial to the new …

A method of two-step laser etching for bulk micromachining of 4H–SiC membranes through
a femtosecond (fs) laser with a wavelength of 532 nm, a pulse width of 290 fs and a …