High-k oxide insulators (Al 2 O 3 and HfO 2) have been deposited on a single crystalline hydrogenated diamond (H-diamond) epilayer by an atomic layer deposition technique at …
Using first-principles calculations based on density functional theory, we investigate the impact of defects near interfaces of semiconductor channel materials and oxide dielectrics …
We perform first‐principles calculations to investigate the electronic structure of native defects in various oxide dielectrics to address the impact of defects on GaN/oxide metal …
T Aoki, N Fukuhara, T Osada, H Sazawa… - Applied Physics …, 2014 - iopscience.iop.org
GaAs-based metal–oxide–semiconductor heterostructure field-effect transistors (MOSHFETs) with Al 2 O 3 gate oxide and in situ AlN passivation were investigated …
Conventional Si complementary-metal-oxide-semiconductor (CMOS) scaling is fast approaching its limits. The extension of the logic device roadmap for future enhancements in …