As a common type of microelectromechanical systems (MEMS) inertial sensors, comb-
structured air-gap acceleration sensors have been applied to various industrial devices and …

It is common in the field of printed electronics that polydimethylsiloxane (PDMS) be used as
a dielectric layer for capacitive sensors because of its high elasticity and restoration force …

Although printed electronics technology has been recently employed in the production of
various devices, its use for the fabrication of electronic devices with air-gap structures …

This paper presents the fabrication by means of roll-to-roll slot-die coating and
characterization of air gap-based cantilever type capacitive acceleration sensors. As the …

Sensor miniaturization offers significant advantages, including enhanced SoC integration
efficiency, reduced cost, and lightweight design. While the roll-to-roll printed electronics …