Monolithic 3D integration of back-end compatible 2D material FET on Si FinFET

SX Guan, TH Yang, CH Yang, CJ Hong… - npj 2D Materials and …, 2023 - nature.com
The performance enhancement of integrated circuits relying on dimension scaling (ie,
following Moore's Law) is more and more challenging owing to the physical limit of Si …

Organic/Inorganic Hybrid Top-Gate Transistors with Ultrahigh Electron Mobility via Enhanced Electron Pathways

JM Park, H Lee, GO Lee, SC Jang… - … Applied Materials & …, 2022 - ACS Publications
The top-gate structure is currently adopted in various flat-panel displays because of its
diverse advantages such as passivation from the external environment and process …

High Hall-Effect Mobility of Large-Area Atomic-Layered Polycrystalline ZrS2 Film Using UHV RF Magnetron Sputtering and Sulfurization

M Hamada, K Matsuura, T Sakamoto… - IEEE Journal of the …, 2019 - ieeexplore.ieee.org
A high Hall-effect mobility of 1,250 cm 2 V 1 s− 1 is achieved in ZrS 2 film as a two-
dimensional semiconductor. A large-area atomic-layered polycrystalline ZrS 2 film was …

Sheet resistance reduction of MoS₂ film using sputtering and chlorine plasma treatment followed by sulfur vapor annealing

T Hamada, S Tomiya, T Tatsumi… - IEEE Journal of the …, 2021 - ieeexplore.ieee.org
Sheet resistance (R sheet) reduction of a-few-layered molybdenum disulfide (MoS 2) film
using sputtering is investigated in this study. To enhance the carrier density, chlorine (Cl2) …

ZrS2 symmetrical-ambipolar FETs with near-midgap TiN film for both top-gate electrode and Schottky-barrier contact

M Hamada, K Matsuura, T Hamada… - Japanese Journal of …, 2021 - iopscience.iop.org
ZrS 2 amibipolar MISFETs are obtained in operations with both electrons and holes. A
layered polycrystalline ZrS 2 thin film was formed by sputtering and sulfur-vapor annealing …

Normally-off sputtered-MoS2 nMISFETs with TiN top-gate electrode all defined by optical lithography for chip-level integration

K Matsuura, M Hamada, T Hamada… - Japanese Journal of …, 2020 - iopscience.iop.org
We demonstrate chip-level integrated n-type metal–insulator–semiconductor field effect
transistors with a sputtered molybdenum disulfide (MoS 2) thin channel and titanium nitride …

Impact of Underlying Insulators on the Crystallinity and Antisite Defect Formation in PVD-MoS2 Films

N Matsunaga, S Imai, T Shirokura… - IEEE Journal of the …, 2024 - ieeexplore.ieee.org
The effect of different underlying insulators on molybdenum disulfide (MoS2) films deposited
using sputtering, which is a physical vapor deposition (PVD) method, was studied. The study …

Enhancement-mode accumulation capacitance–voltage characteristics in TiN/ALD-Al2O3/sputtered-MoS2 top-gated stacks

H Tanigawa, K Matsuura, I Muneta… - Japanese Journal of …, 2020 - iopscience.iop.org
This study demonstrates atomic layer deposition of an Al 2 O 3 film on a sputtered-MoS 2
film and capacitance–voltage (C–V) characteristics of TiN top-gated metal–insulator …

Generation of STDP With non-volatile tunnel-FET memory for large-scale and low-power spiking neural networks

H Kino, T Fukushima, T Tanaka - IEEE Journal of the Electron …, 2020 - ieeexplore.ieee.org
Spiking neural networks (SNNs) have attracted considerable attention as next-generation
neural networks. As SNNs consist of devices that have spike-timing-dependent plasticity …

Side-Contact Architecture for p/n-Stacked-Nano-Sheet ZrS2 2D-FETs Beyond 1-nm Technology Node

M Hamada, T Hamada, K Kakushima… - 2021 20th …, 2021 - ieeexplore.ieee.org
Advanced logic devices have already reached a 5-nm technology node, which features a
FinFET in Fig. 1 (a) and a new channel material of high mobility for p-type operation [1]. New …