TM Choi, ES Jung, JU Yoo, HR Lee,
SG Pyo - Micromachines, 2024 - pmc.ncbi.nlm.nih.gov
In this study, we analyze metal–insulator–metal (MIM) capacitors with different thicknesses
of SixNy film (650 Å, 500 Å, and 400 Å) and varying levels of film quality to improve their …