An efficient electrostatic actuation model for MEMS-based ultrasonic transducers with fringing effect

AG Dastidar, M Pal, RC Tiwari, R Maity… - Microsystem …, 2023 - Springer
In this paper an improved analytical model of electrostatic force for capacitive
micromachined ultrasonic transducer (CMUT) has been carried out. These findings are …

Squeeze film effect in surface micromachined nano ultrasonic sensor for different diaphragm displacement profiles

AG Dastidar, R Maity, RC Tiwari, D Vidojevic… - Sensors, 2023 - mdpi.com
In the present paper, we have analytically explored the small variations of the local pressure
in the trapped air film of both sides of the clamped circular capacitive micromachined …

An efficient model of nanoelectromechanical systems based ultrasonic sensor with fringing field effects

R Maity, NP Maity, S Baishya - IEEE Sensors Journal, 2019 - ieeexplore.ieee.org
In this work, modeling of parasitic capacitance due to fringing field and its influence on the
performance of nano-electro-mechanical-system (NEMS) capacitive micromachined …

Transmission rules of ultrasonic at the contact interface between soil medium in farmland and ultrasonic excitation transducer

S Huang, C Lu, H Li, J He, Q Wang, P Yuan… - … and Electronics in …, 2021 - Elsevier
To analyze the phenomenon of distortion and frequency dispersion in the ultrasonic
pressure curve at the excitation transducer-soil contact interface (incident interface), a new …

Effects of fringing capacitances and electrode's finiteness in improved SiC membrane based micromachined ultrasonic transducers

M Pal, C Lalengkima, R Maity, S Baishya… - Microsystem …, 2021 - Springer
The influence of fringing electric fields at the edges of the Capacitance Micromachined
Ultrasonic Transducer's (CMUT's) gap and insulation layers are included into the parallel …

Analysis of spring softening effect on the collapse voltage of capacitive MEMS ultrasonic transducers

R Maity, NP Maity, K Guha, S Baishya - Microsystem Technologies, 2021 - Springer
This paper explained the dependency of collapse voltage on semiconductor device
structural features (membrane diameter, membrane thickness and the vertical distance …

Analysis of fringing capacitance effect on the performance of micro‐electromechanical‐system‐based micromachined ultrasonic air transducer

R Maity, NP Maity, K Guha, S Baishya - Micro & Nano Letters, 2018 - Wiley Online Library
The work analyses the significance of fringing capacitance in modelling effectively the
amplitude of the ultrasonic waves generated by silicon nitride membrane‐based …

Micro-electro-mechanical-system based capacitive ultrasonic transducer as an efficient immersion sensor

R Maity, K Gogoi, NP Maity - Microsystem Technologies, 2019 - Springer
In this paper we have analyzed the influence of the membrane inherent residual stress
along with its Young's modulus for evaluating the characteristics of a capacitive …

An improved displacement model for micro-electro-mechanical-system based ultrasonic transducer

M Pal, NP Maity, R Maity - Microsystem Technologies, 2019 - Springer
This paper analyses the electrical capacitance, electrostatic force on the membrane and
displacement profile of a silicon nitride based micromachined ultrasonic transducer. These …

Fringing capacitive effect of silicon carbide based nano-electro-mechanical-system micromachined ultrasonic transducers: analytical modeling and FEM simulation

R Maity, NP Maity, K Srinivasa Rao, G Sravani… - … on electrical and …, 2019 - Springer
This paper models the fringing field effects in a capacitive micromachined ultrasonic
transducer (CMUT) structure for determining the sensitivity of the device. CMUT is used as a …