RJ Dunki-Jacobs - US Patent 7,995,045, 2011 - Google Patents
An apparatus and method for allowing multiple high and low resolution SBI and conventional FPA imaging devices to use a common high resolution monitor and archive …
R Yeh, S Hollar, KSJ Pister - Journal of Microelectromechanical …, 2002 - ieeexplore.ieee.org
We have demonstrated a family of large force and large displacement electrostatic linear inchworm motors that operate with moderate to high voltages. The inchworm motor design …
T Akiyama, D Collard, H Fujita - Journal of …, 1997 - ieeexplore.ieee.org
The self-assembling of three-dimensional (3-D) MEMS from polysilicon surface micromachined part is very attractive. To avoid risky external manipulation, the practical use …
A class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram are proposed …
C Rossi, D Estève, C Mingués - Sensors and Actuators A: Physical, 1999 - Elsevier
Mechanical micro actuators on silicon is playing a major role in the development of microsystems. In this context, many structures have been performed on electrostatic, piezo …
Having benefited from technological developments, such as surface micromachining, high- aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal …
N Tas, J Wissink, L Sander, T Lammerink… - Sensors and Actuators A …, 1998 - Elsevier
The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate …
We present a review of surface micromachining technology with anemphasis on polycrystalline silicon (polysilicon) microstructures. The problems of release-related and in …
AF Winfield - Telerobotic applications, 2000 - Citeseer
This paper examines a number of key areas of current research in tele-operated robotics that could have a significant impact on future directions and applications. Although accurate …