A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)
A Anders - Surface and Coatings Technology, 2014 - Elsevier
High power impulse magnetron sputtering (HiPIMS) has been at the center of attention over
the last years as it is an emerging physical vapor deposition (PVD) technology that …
the last years as it is an emerging physical vapor deposition (PVD) technology that …
[HTML][HTML] Dense and hard TiWC protective coatings grown with tungsten ion irradiation using WC-HiPIMS/TiC-DCMS co-sputtering technique without external heating
TW Hsu, G Greczynski, R Boyd, S Kolozsvári… - Applied Surface …, 2023 - Elsevier
Titanium tungsten carbide (TiWC) coatings are deposited by a combined high-power
impulse and dc magnetron co-sputtering (HiPIMS/DCMS) technique. No external heating is …
impulse and dc magnetron co-sputtering (HiPIMS/DCMS) technique. No external heating is …
High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature
Titanium boride, TiB x, thin films are grown in pure Ar discharges by high-power impulse
magnetron sputtering (HiPIMS) from a compound TiB 2 target. Film compositions are …
magnetron sputtering (HiPIMS) from a compound TiB 2 target. Film compositions are …
Structural and phase transformations control in Ti and Al cathode materials, WC-Co substrate, and Ti1-xAlxN coating to improve their physico-mechanical and wear …
A Kameneva, N Antonova, M Pesin, V Makarov… - International Journal of …, 2022 - Elsevier
The paper analyzed temperature ranges of aggregate/polymorphic state changes, phase
and structural transformations in Al, Ti, WC-Co, and Ti 1-x Al x N, leading to the gradient of …
and structural transformations in Al, Ti, WC-Co, and Ti 1-x Al x N, leading to the gradient of …
Charge state, angular distribution, and kinetic energy of ions from multicomponent-cathodes in vacuum arc devices
We present research results on vacuum arc plasma produced with multicomponent cathode
made of several different elements. The ion mass-to-charge-state spectra of the plasmas …
made of several different elements. The ion mass-to-charge-state spectra of the plasmas …
Effect of cathode composition and nitrogen pressure on macroparticle generation and type of arc discharge in a DC arc source with Ti–Al compound cathodes
Thin films deposited with unfiltered DC arc plasma from Ti, Ti 0.75 Al 0.25, Ti 0.50 Al 0.50, Ti
0.30 Al 0.70, and Al cathodes were characterized with a scanning electron microscope for …
0.30 Al 0.70, and Al cathodes were characterized with a scanning electron microscope for …
[HTML][HTML] Cathode spot behavior in nitrogen and oxygen gaseous atmospheres and concomitant cathode surface modifications
The cathode spot behavior influences the arc plasma chemistry and film growth conditions
during reactive cathodic arc deposition of nitride and oxide films. Cathode spots can be …
during reactive cathodic arc deposition of nitride and oxide films. Cathode spots can be …
[HTML][HTML] Insights into surface modification and erosion of multi-element arc cathodes using a novel multilayer cathode design
M Golizadeh, A Anders, F Mendez Martin… - Journal of applied …, 2020 - pubs.aip.org
Nowadays, multi-element cathodes are frequently employed to grow multi-element thin films
and coatings using cathodic arc deposition processes. During cathode erosion, the cathode …
and coatings using cathodic arc deposition processes. During cathode erosion, the cathode …
A comparison of plasma generation, plasma transport, and film formation for a DC vacuum arc source with Ti–X compound cathodes (X= W, C, Al, and Si)
This investigation reports the influence of Ti–C and Ti–W cathode composition on an
industrial-scale dc vacuum arc plasma source. Further, we analyze the influence of plasma …
industrial-scale dc vacuum arc plasma source. Further, we analyze the influence of plasma …
Thermal stability of macroparticles in Ti0. 27Al0. 21N0. 52 coatings
DM Holzapfel, Z Czigány, AO Eriksson, M Arndt… - Applied Surface …, 2021 - Elsevier
The presence of macroparticles in cathodic arc evaporated coatings is considered to be one
major drawback of this synthesis method. We demonstrate with transmission electron …
major drawback of this synthesis method. We demonstrate with transmission electron …