Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview
The use of wide bandgap semiconductor thin films as sensing materials for micro-electrical–
mechanical systems (MEMS) sensors has been the subject of much discussion in the …
mechanical systems (MEMS) sensors has been the subject of much discussion in the …
Controlled growth of semiconducting ZnO nanorods for piezoelectric energy harvesting-based nanogenerators
Zinc oxide (ZnO) nanorods have attracted considerable attention in recent years owing to
their piezoelectric properties and potential applications in energy harvesting, sensing, and …
their piezoelectric properties and potential applications in energy harvesting, sensing, and …
Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting
Zinc oxide (ZnO) is an environmental-friendly semiconducting, piezoelectric and non-
ferroelectric material, and plays an essential role for applications in microelectromechanical …
ferroelectric material, and plays an essential role for applications in microelectromechanical …
ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance
Zinc oxide (ZnO) thin film piezoelectric microelectromechanical systems (MEMS) based
vibration energy harvesters with two different designs are presented. These harvesters …
vibration energy harvesters with two different designs are presented. These harvesters …
[HTML][HTML] A novel ZnO piezoelectric microcantilever energy scavenger: Fabrication and characterization
This novel piezoelectric zinc oxide (ZnO) thin film microcantilever was fabricated by
micromachining technique. To release the cantilever, wet anisotropic etching of Silicon (Si) …
micromachining technique. To release the cantilever, wet anisotropic etching of Silicon (Si) …
Effects of growth temperature and reactor pressure on AlN thin film grown by metal-organic chemical vapor deposition
Following the development of the semiconductor industry, advanced and multifunctional
material aluminum nitride (AlN) is widely used. However, AlN thin film faces the dilemma of …
material aluminum nitride (AlN) is widely used. However, AlN thin film faces the dilemma of …
Zinc oxide nanoparticles coated with (3-aminopropyl) triethoxysilane as additives for boosting the dielectric, ferroelectric, and piezoelectric properties of poly …
In this study, we report the synergistic role of (3-aminopropyl) triethoxysilane (APTES)
functionalization of zinc oxide (ZnO) nanoparticles and low-temperature phase-inversion for …
functionalization of zinc oxide (ZnO) nanoparticles and low-temperature phase-inversion for …
Poly (vinylidene fluoride-trifluoroethylene)-ZnO nanoparticle composites on a flexible poly (dimethylsiloxane) substrate for energy harvesting
SC Karumuthil, SP Rajeev… - ACS Applied Nano …, 2019 - ACS Publications
In this article, we report on an energy-harvesting device using a hybrid flexible polymer
nanocomposite as a tribo–piezo layer for energy generation. Piezoelectric nano zinc oxide …
nanocomposite as a tribo–piezo layer for energy generation. Piezoelectric nano zinc oxide …
Piezoelectric based MEMS acoustic sensor for wide frequency applications
This work describes the development of an acoustic sensor based on piezoelectric ZnO thin
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
film to be utilized for aero-acoustic measurements. The design of the device was carried out …
Analysis of Heterostructure Formation of Abnormally Oriented Grains in Sputter-Deposited AlScN Films and Its Impact on Bulk Acoustic Wave Devices
The presence of abnormally oriented grains (AOGs) in sputter-deposited aluminum
scandium nitride (AlScN) films significantly degrades their physical properties …
scandium nitride (AlScN) films significantly degrades their physical properties …