Advancements in the Cu Pillar Based PCB Microfluidic System Integration with SiGe BiCMOS Technology

EC Durmaz, C Heine, Z Cao… - 2024 Smart Systems …, 2024 - ieeexplore.ieee.org
This paper reports our recent efforts in the advancements in the integration of the novel
copper pillar based PCB microfluidic system for sub-THz microfluidic sensor applications. A …