Surface modification of polymers: methods and applications

SK Nemani, RK Annavarapu… - Advanced Materials …, 2018 - Wiley Online Library
Low cost, controlled crystallinity, chemical, and mechanical stability enable application of
polymers in energy, water, electronics, and biomedical industries. Recent studies have …

From self-assembled monolayers to coatings: Advances in the synthesis and nanobio applications of polymer brushes

M Kim, SK Schmitt, JW Choi, JD Krutty, P Gopalan - Polymers, 2015 - mdpi.com
In this review, we describe the latest advances in synthesis, characterization, and
applications of polymer brushes. Synthetic advances towards well-defined polymer brushes …

Optimized design of block copolymers with covarying properties for nanolithography

H Feng, M Dolejsi, N Zhu, S Yim, W Loo, P Ma… - Nature Materials, 2022 - nature.com
The ability to impart multiple covarying properties into a single material represents a grand
challenge in manufacturing. In the design of block copolymers (BCPs) for directed self …

Nanomanufacturing: a perspective

JA Liddle, GM Gallatin - ACS nano, 2016 - ACS Publications
Nanomanufacturing, the commercially scalable and economically sustainable mass
production of nanoscale materials and devices, represents the tangible outcome of the …

Directed Self-Assembly of Polystyrene-b-poly(propylene carbonate) on Chemical Patterns via Thermal Annealing for Next Generation Lithography

GW Yang, GP Wu, X Chen, S Xiong, CG Arges, S Ji… - Nano …, 2017 - ACS Publications
Directed self-assembly (DSA) of block copolymers (BCPs) combines advantages of
conventional photolithography and polymeric materials and shows competence in …

Thin film block copolymer self-assembly for nanophotonics

AA Kulkarni, GS Doerk - Nanotechnology, 2022 - iopscience.iop.org
The nanophotonic engineering of light–matter interactions has profoundly changed research
behind the design and fabrication of optical materials and devices. Metasurfaces—arrays of …

Directed self-assembly of block copolymers for sub-10 nm fabrication

Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - iopscience.iop.org
Directed self-assembly (DSA) emerges as one of the most promising new patterning
techniques for single digit miniaturization and next generation lithography. DSA achieves …

Directed Self-Assembly of Triblock Copolymer on Chemical Patterns for Sub-10-nm Nanofabrication via Solvent Annealing

S Xiong, L Wan, Y Ishida, YA Chapuis, GSW Craig… - ACS …, 2016 - ACS Publications
Directed self-assembly (DSA) of block copolymers (BCPs) is a leading strategy to pattern at
sublithographic resolution in the technology roadmap for semiconductors and is the only …

Ultrathin random copolymer-grafted layers for block copolymer self-assembly

K Sparnacci, D Antonioli, V Gianotti… - … applied materials & …, 2015 - ACS Publications
Hydroxyl-terminated P (Sr-MMA) random copolymers (RCPs) with molecular weights (M n)
from 1700 to 69000 and a styrene unit fraction of approximately 61% were grafted onto a …

Implementation of a chemo-epitaxy flow for directed self-assembly on 300-mm wafer processing equipment

PAR Delgadillo, R Gronheid, CJ Thode… - Journal of Micro …, 2012 - spiedigitallibrary.org
The implementation of our previously reported chemo-epitaxy method for directed self-
assembly (DSA) of block copolymers (BCPs) on 300-mm wafers is described in detail. Some …