Z Hu, Y Lv, C Zhao, Q Feng, Z Feng… - IEEE Electron …, 2020 - ieeexplore.ieee.org
In this letter, we report on demonstrating a high performance vertical β-Ga 2 O 3 Schottky
barrier diode (SBD) based on a self-aligned beveled fluorine plasma treatment (BFPT) edge …