Achieving the intrinsic limit of quality factor in VHF extensional-mode block resonators
H Mansoorzare, S Moradian… - 2018 IEEE …, 2018 - ieeexplore.ieee.org
In this work we demonstrate that it is possible to push the most dominant sources of extrinsic
loss (ie anchor and air loss) in high-frequency thin-film piezoelectric-on-substrate (TPoS) …
loss (ie anchor and air loss) in high-frequency thin-film piezoelectric-on-substrate (TPoS) …
Side-supported radial-mode thin-film piezoelectric-on-silicon disk resonators
S Shahraini, M Shahmohammadi… - IEEE transactions on …, 2019 - ieeexplore.ieee.org
In this paper, anisotropy of single-crystalline silicon (SCS) is exploited to enable side-
supported radial-mode thin-film piezoelectric-on-substrate (TPoS) disk resonators. In …
supported radial-mode thin-film piezoelectric-on-substrate (TPoS) disk resonators. In …
Design and Implementation of Silicon-Based MEMS Resonators for Application in Ultra Stable High Frequency Oscillators
S Shahraini - 2019 - stars.library.ucf.edu
The focus of this work is to design and implement resonators for ultra-stable high-frequency
(> 100MHz) silicon-based MEMS oscillators. Specifically, two novel types of resonators are …
(> 100MHz) silicon-based MEMS oscillators. Specifically, two novel types of resonators are …