Gait analysis continues to be an important technique for many clinical applications to
diagnose and monitor certain diseases. Many mental and physical abnormalities cause …

Inertial sensors based on MEMS technology are fast becoming ubiquitous with their
adoption into many types of consumer electronics products, including smart phones, tablets …

This paper presents a review of silicon micromachined accelerometers and gyroscopes.
Following a brief introduction to their operating principles and specifications, various device …

This paper introduces a differential vibrating beam MEMS accelerometer demonstrating
excellent long-term stability for applications in gravimetry and seismology. The MEMS …

This paper describes a three-axis accelerometer implemented in a surface-micromachining
technology with integrated CMOS. The accelerometer measures changes in a capacitive …

IC-compatible microelectromechanical intermediate frequency filters using integrated
resonators with Q's in the thousands to achieve filter Q's in the hundreds have been …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface
micromachining technology, is described, for which the oscillation frequency is controlled by …

The development of onboard sensors in combination with internet connectivity provides a
better driving experience, which fuels the growth of automotive market. The ever growing …

This paper presents a review of the latest advances in the field of capacitive, inductive (eddy
current), and magnetic sensors, for measurement of absolute displacement. The need for …