An article such as a susceptor includes a body of a thermally conductive material coated by
a first protective layer and a second protective layer over a surface of the body. The first …

To manufacture a ceramic coated article, at least one surface of a conductive article is
roughened to a roughness of approximately 100 micro-inches (μin) to approximately 300 …

Set forth herein are garnet material compositions, eg, lithium-stuffed garnets and lithium-
stuffed garnets doped with alumina, which are suitable for use as electrolytes and catholytes …

Set forth herein are garnet material compositions, eg, lithium-stuffed garnets and lithium-
stuffed garnets doped with alumina, which are suitable for use as electrolytes and catholytes …

The instant disclosure sets forth multiphase lithium-stuffed garnet electrolytes having
secondary phase inclusions, wherein these secondary phase inclusions are material (s) …

2013, O156958 A1 6, 2013 Belov et al. 4,695,439 A 9, 1987 Ritsko et al. 2013/0174983 A1
7, 2013 Kikuchi et al. 4,773,928 A 9/1988 Houck et al. 2013/0216783 Al 8, 2013 Duan et al …

(51) Int. Cl. 2005/0271984 A1* 12/2005 Brueckner et al............. 430,323 HOI. 37/32(2006.01)
2006.0068. 189 A1 3/2006 Raybould et al. 2006/0096.703 A1 5/2006 Moriya et al. C04B …

5,631,803 A 5, 1997 Cameron et al. 2009/O133713 A1 5/2009 Ohmi et al. 5,687,679 A
11/1997 Mullin et al. 2009/0214825 A1 8/2009 Sun et al....................... 428,141 5,800,871 A …

A faceplate or a selectivity modulation device (SMD) for a plasma generation chamber has a
plasma resistant ceramic coating on a surface of the faceplate or SMD, wherein the plasma …

BACKGROUND In the semiconductor industry, devices are fabricated by a number of
manufacturing processes producing structures of an ever-decreasing size. Some …