An article such as a susceptor includes a body of a thermally conductive material coated by
a first protective layer and a second protective layer over a surface of the body. The first …

An article comprises a body having a coating. The coating comprising a mixture of a first
oxide and a second oxide. The coating includes a glaze on a surface of the coating, the …

An article comprises a body having a coating. The coating comprising a eutectic system
having a super-lattice of a first fluoride and a second fluoride. The coating includes a glaze …

Embodiments of the invention relate to compositions of metal oxyfluoride-comprising glazes
or metal fluoride-comprising glazes, glass ceramics, and combinations thereof which are …

To manufacture a ceramic coated article, at least one surface of a conductive article is
roughened to a roughness of approximately 100 micro-inches (μin) to approximately 300 …

(57) ABSTRACT A machined ceramic article having an initial Surface defect density and an
initial Surface roughness is provided. The machined ceramic article is heated to a …

BACKGROUND In the semiconductor industry, devices are fabricated by a number of
manufacturing processes producing structures of an ever-decreasing size. Some …

A substrate support assembly comprises a ceramic body and a thermally conductive base
bonded to a lower surface of the ceramic body. The substrate support assembly further …

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7, 2013 Kikuchi et al. 4,773,928 A 9/1988 Houck et al. 2013/0216783 Al 8, 2013 Duan et al …

(51) Int. Cl. 2005/0271984 A1* 12/2005 Brueckner et al............. 430,323 HOI. 37/32(2006.01)
2006.0068. 189 A1 3/2006 Raybould et al. 2006/0096.703 A1 5/2006 Moriya et al. C04B …