Structural dynamics of microsystems—current state of research and future directions
RM Lin, WJ Wang - Mechanical systems and signal processing, 2006 - Elsevier
Microsystems or micro-electro-mechanical systems (MEMS), as a newly emerged
revolutionary enabling technology, has brought both opportunities and challenges to the …
revolutionary enabling technology, has brought both opportunities and challenges to the …
Measurement of the mechanical properties of electroplated gold thin films using micromachined beam structures
We have measured the Young's modulus, residual stress, and stress gradient of
electroplated gold thin films using surface micromachined beam structures. Cantilever and …
electroplated gold thin films using surface micromachined beam structures. Cantilever and …
An investigation of fatigue in LIGA Ni MEMS thin films
SM Allameh, J Lou, F Kavishe, T Buchheit… - Materials Science and …, 2004 - Elsevier
This paper presents results of an experimental study of fatigue in LIGA Ni micro-electro-
mechanical systems (MEMS)/thin films produced by electroplating from a sulfamate bath at a …
mechanical systems (MEMS)/thin films produced by electroplating from a sulfamate bath at a …
[HTML][HTML] Essential refinements of spherical nanoindentation protocols for the reliable determination of mechanical flow curves
A Leitner, V Maier-Kiener, D Kiener - Materials & Design, 2018 - Elsevier
Understanding and linking mechanical properties obtained by spherical indentation
experiments to uniaxial data is extremely challenging. Since the first attempts in the early …
experiments to uniaxial data is extremely challenging. Since the first attempts in the early …
An introduction to mechanical-properties-related issues in MEMS structures
SM Allameh - Journal of materials science, 2003 - Springer
A brief introduction to the issues related to the mechanical properties of MEMS components
in terms of their functionality, types of loading and modes of operation is presented. At the …
in terms of their functionality, types of loading and modes of operation is presented. At the …
Mechanisms of fatigue in LIGA Ni MEMS thin films
This paper presents the results of an experimental study of the mechanisms of fatigue in
LIGA Ni micro-electro-mechanical systems (MEMS) thin films with micro-scale columnar and …
LIGA Ni micro-electro-mechanical systems (MEMS) thin films with micro-scale columnar and …
Surface acoustic wave trapping in a periodic array of mechanical resonators
The existence of two families of surface acoustic modes trapped by steep ridges on a
piezoelectric substrate, shear horizontal and vertically polarized surface modes, is …
piezoelectric substrate, shear horizontal and vertically polarized surface modes, is …
Characterization of Young's modulus and residual stress gradient of MetalMUMPs electroplated nickel film
S He, JS Chang, L Li, H Ho - Sensors and Actuators A: Physical, 2009 - Elsevier
Metal multi-user MEMS processes (MetalMUMPs) offered by MEMSCAP provide a 20μm
thick electroplated nickel film suitable for constructing micro RF tunable capacitors, RF …
thick electroplated nickel film suitable for constructing micro RF tunable capacitors, RF …
Residual stress gradients in electroplated nickel thin films
Residual stress gradients in electroplated nickel films of 1 μm thickness are characterized for
a wide range of current densities (1–20 mA/cm 2) and electroplating temperatures (30–60° …
a wide range of current densities (1–20 mA/cm 2) and electroplating temperatures (30–60° …
Nanomechanical properties of nanocrystalline Ni–Fe mold insert
YM Yeh, GC Tu, TH Fang - Journal of Alloys and Compounds, 2004 - Elsevier
Nanocrystalline Ni–Fe alloy micro-mold inserts were fabricated by UV lithographic
technology and pulse current electroforming process. The structure, surface and mechanical …
technology and pulse current electroforming process. The structure, surface and mechanical …