Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

This paper deals with the pull-in instability of cantilever nano-switches subjected to
electrostatic and intermolecular forces in the framework of the two-phase nonlocal theory of …

A new experimental device has been designed and produced with the purpose of
investigating the possible effect of nano-scale interaction forces on the reliability issue …

In this paper, a three-axis capacitor accelerator has been analyzed, modeled and optimized
using micro-electromechanical systems technology. In the proposed structure, acceleration …

En este trabajo se presenta el análisis y caracterización del diseño de un acelerómetro del
tipo capacitivo desarrollado en el CICTA y fabricado con tecnología PolyMUMP's …

Microelectromechanical systems (MEMS)-based devices capable of measuring wall shear
stress vectors in three dimensional aerodynamic flow fields are provided. A device can …

A dual axis MEMS capacitive Accelerometer with a single proof mass structure has been
designed for the range of plusmn30 g. Instead of using two single axis accelerometer …

This paper investigates a new modeling and analysis of the voltage induced reciprocated
beam bending effects in the unit cell of a planar, variable gap type, capacitive comb drive …

This paper deals with the development of a fully electrical method to estimate the sensitivity
of capacitive MEMS accelerometers in batch fabrication. The objectives are to test and …

This paper is the follow-up of the research we conduct to find an alternative way to measure
the sensitivity of capacitive MEMS accelerometers. The goal is to be able to perform …