Abstract Two-dimensional (2D) materials could potentially be used to develop advanced
monolithic integrated circuits. However, despite impressive demonstrations of single devices …

Atomic layer etching (ALE) is a technique for removing thin layers of material using
sequential reaction steps that are self-limiting. ALE has been studied in the laboratory for …

The ability to achieve near-atomic precision in etching different materials when transferring
lithographically defined templates is a requirement of increasing importance for nanoscale …

The atomic layer etching (ALE) of Al2O3 was demonstrated using sequential, self-limiting
thermal reactions with tin (II) acetylacetonate (Sn (acac) 2) and hydrogen fluoride (HF) as the …

Dialysis is a ubiquitous separation process in biochemical processing and biological
research. State‐of‐the‐art dialysis membranes comprise a relatively thick polymer layer with …

Carbon nanomaterials such as graphene exhibit unique material properties including high
electrical conductivity, surface area, and biocompatibility that have the potential to …

Following the graphene isolation, strong interest in two dimensional (2D) materials has been
driven by their outstanding properties. Their typical intrinsic structure, including strong in …

Abstract 2D materials including graphene, transition metal dichalcogenides, and
phosphorene have been widely researched for electronic and optoelectronic applications in …

Etching technology–one of the representative modern semiconductor device makers–serves
as a broad descriptor for the process of removing material from the surfaces of various …

Two-dimensional (2D) metal dichalcogenides like molybdenum disulfide (MoS2) may
provide a pathway to high-mobility channel materials that are needed for beyond …