KJ Kanarik, T Lill, EA Hudson, S Sriraman… - Journal of Vacuum …, 2015 - pubs.aip.org
Atomic layer etching (ALE) is a technique for removing thin layers of material using sequential reaction steps that are self-limiting. ALE has been studied in the laboratory for …
GS Oehrlein, D Metzler, C Li - … Journal of Solid State Science and …, 2015 - iopscience.iop.org
The ability to achieve near-atomic precision in etching different materials when transferring lithographically defined templates is a requirement of increasing importance for nanoscale …
The atomic layer etching (ALE) of Al2O3 was demonstrated using sequential, self-limiting thermal reactions with tin (II) acetylacetonate (Sn (acac) 2) and hydrogen fluoride (HF) as the …
Dialysis is a ubiquitous separation process in biochemical processing and biological research. State‐of‐the‐art dialysis membranes comprise a relatively thick polymer layer with …
Carbon nanomaterials such as graphene exhibit unique material properties including high electrical conductivity, surface area, and biocompatibility that have the potential to …
W Hao, C Marichy, C Journet - 2D Materials, 2018 - iopscience.iop.org
Following the graphene isolation, strong interest in two dimensional (2D) materials has been driven by their outstanding properties. Their typical intrinsic structure, including strong in …
T He, Z Wang, F Zhong, H Fang… - Advanced Materials …, 2019 - Wiley Online Library
Abstract 2D materials including graphene, transition metal dichalcogenides, and phosphorene have been widely researched for electronic and optoelectronic applications in …
Etching technology–one of the representative modern semiconductor device makers–serves as a broad descriptor for the process of removing material from the surfaces of various …
Two-dimensional (2D) metal dichalcogenides like molybdenum disulfide (MoS2) may provide a pathway to high-mobility channel materials that are needed for beyond …