Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

Surface acoustic wave (SAW) devices have been widely used in different fields and will
continue to be of great importance in the foreseeable future. These devices are compact …

With the increasing requirements for microelectromechanical systems (MEMS) regarding
stability, miniaturization and integration, novel materials such as wide band gap …

Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their
excellent mass resolution, have been studied for many applications, including DNA …

We have realized a distributed mass-sensor using micro-cantilevers. The micro-cantilevers
were actuated using piezoelectric ZnO thin films. The micro-cantilevers layer stack consists …

Zinc oxide (ZnO)-based film bulk acoustic resonator consisting of a piezoelectric element
(Au∕ Zn O∕ Pt) and a Bragg reflector (⁠ Zn O∕ Pt multilayer structure) has been fabricated …

As excessive exposure to airborne particulate matter (PM) results in adverse health effects,
the development of real-time PM monitoring is highly relevant. The objective of this article is …

Gravimetric resonators based on micro/nanoelectromechanical systems (M/NEMS) are
potential candidates in developing smaller, less expensive, and higher-performance gas …

A new type of ultraviolet (UV) light sensor based on film bulk acoustic wave resonator
(FBAR) is proposed. The new sensor uses gold and a thin n-type ZnO layer deposited on the …

Localizing and measuring aerosol deposition is essential to improve our knowledge
regarding contaminants and their transfer mechanisms, the cleanliness of people's …