High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …

A high-performance triaxial fast tool servo (FTS) with the hybrid electromagnetic–
piezoelectric actuation and the hybrid parallel–serial-kinematic structure is reported …

This study proposes a new rate-dependent feedforward compensator for compensation of
hysteresis nonlinearities in smart materials-based actuators without considering the …

Nanotechnology is the branch of science which deals with the manipulation of matters at an
extremely high resolution down to the atomic level. In recent years, atomic force microscopy …

The development of nanotechnology requires a precision tracking of periodic signals in
order to complete repetitive industrial or scientific tasks. Although repetitive control is an …

In most nanotechnology applications, speed and precision are important requirements for
obtaining good topographical maps of material surfaces using atomic force microscopes …

We study a novel piezo-driven nanopositioning mechanism in the horizontal plane. For each
horizontal axis, we employ two externally leverage mechanisms with flexure hinges to …

This paper proposes a double-chamber valveless pump actuated by a cantilever ionic
polymer-metal composite (IPMC), whose deflection is measured by inductive sensors. While …

In the field of nanotechnology, there is a growing demand to provide precision control and
manipulation of devices with the ability to interact with complex and unstructured …

A serial 2D planar compliant mechanism has been proposed based on novel" S-shaped"
flexure hinges for atomic force microscopy applications. The bridge-lever type mechanism …