Fundamentals of atomic and close-to-atomic scale manufacturing: a review

J Gao, X Luo, F Fang, J Sun - International Journal of Extreme …, 2021 - iopscience.iop.org
Atomic and close-to-atomic scale manufacturing (ACSM) represents techniques for
manufacturing high-end products in various fields, including future-generation computing …

Tip-based nanofabrication for scalable manufacturing

H Hu, HJ Kim, S Somnath - Micromachines, 2017 - mdpi.com
Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use
a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history …

[HTML][HTML] Next generation of extreme-resolution electron beam lithography

JN Randall, JHG Owen, J Lake, E Fuchs - Journal of Vacuum Science …, 2019 - pubs.aip.org
In top down nanofabrication research facilities around the world, the direct-write high-
resolution patterning tool of choice is overwhelmingly electron beam lithography …

Tip-induced passivation of dangling bonds on hydrogenated Si (100)-2× 1

N Pavliček, Z Majzik, G Meyer, L Gross - Applied Physics Letters, 2017 - pubs.aip.org
Using combined low temperature scanning tunneling microscopy and atomic force
microscopy (AFM), we demonstrate hydrogen passivation of individual, selected dangling …

Advanced scanning probe nanolithography using GaN nanowires

M Behzadirad, S Mecholdt, JN Randall, JB Ballard… - Nano Letters, 2021 - ACS Publications
A fundamental understanding and advancement of nanopatterning and nanometrology are
essential in the future development of nanotechnology, atomic scale manipulation, and …

Automated extraction of single H atoms with STM: tip state dependency

M Møller, SP Jarvis, L Guérinet, P Sharp… - …, 2017 - iopscience.iop.org
The atomistic structure of the tip apex plays a crucial role in performing reliable atomic-scale
surface and adsorbate manipulation using scanning probe techniques. We have developed …

STM-induced desorption and lithographic patterning of Cl–Si (100)-(2× 1)

KJ Dwyer, M Dreyer, RE Butera - The Journal of Physical …, 2019 - ACS Publications
A scanning tunneling microscope (STM) was used to investigate tip-induced chlorine
desorption and lithographic patterning of Cl-terminated Si (100)-(2× 1) surfaces from 4 to …

Machine learning at the (sub) atomic scale: next generation scanning probe microscopy

OM Gordon, PJ Moriarty - Machine Learning: Science and …, 2020 - iopscience.iop.org
We discuss the exciting prospects for a step change in our ability to map and modify matter
at the atomic/molecular level by embedding machine learning algorithms in scanning probe …

[HTML][HTML] All-optical lithography process for contacting nanometer precision donor devices

DR Ward, MT Marshall, DM Campbell, TM Lu… - Applied Physics …, 2017 - pubs.aip.org
We describe an all-optical lithography process that can make electrical contact to nanometer-
precision donor devices fabricated in silicon using scanning tunneling microscopy (STM) …

Scanning tunneling microscope control: A self-tuning PI controller based on online local barrier height estimation

F Tajaddodianfar, SOR Moheimani… - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
We identify the dynamics of a scanning tunneling microscope (STM) in closed loop and
show that the plant dc gain is proportional to the square root of local barrier height (LBH), a …