Recent advances of capacitive sensors: Materials, microstructure designs, applications, and opportunities

AJ Cheng, L Wu, Z Sha, W Chang… - Advanced Materials …, 2023 - Wiley Online Library
Capacitive sensors have advanced rapidly to create new applications including wearable
sensors for human health monitoring, integrated sensors for intelligent surgical devices …

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

X Han, M Huang, Z Wu, Y Gao, Y Xia, P Yang… - Microsystems & …, 2023 - nature.com
Pressure sensors play a vital role in aerospace, automotive, medical, and consumer
electronics. Although microelectromechanical system (MEMS)-based pressure sensors have …

A LC wireless passive temperature-pressure-humidity (TPH) sensor integrated on LTCC ceramic for harsh monitoring

Q Tan, W Lv, Y Ji, R Song, F Lu, H Dong… - Sensors and Actuators B …, 2018 - Elsevier
In this study, a LC wireless passive TPH sensor based on low-temperature co-fired ceramic
(LTCC) technology for harsh TPH monitoring was presented. The LC wireless passive TPH …

Soft gold nanowire sponge antenna for battery-free wireless pressure sensors

K Wang, F Lin, DTH Lai, S Gong, B Kibret, MA Ali… - Nanoscale, 2021 - pubs.rsc.org
The past decade has witnessed growing interest in developing soft wearable pressure
sensors with the ultimate goal of transforming today's hospital-centered diagnosis to …

A high-Q resonant pressure microsensor with through-glass electrical interconnections based on wafer-level MEMS vacuum packaging

Z Luo, D Chen, J Wang, Y Li, J Chen - Sensors, 2014 - mdpi.com
This paper presents a high-Q resonant pressure microsensor with through-glass electrical
interconnections based on wafer-level MEMS vacuum packaging. An approach to …

A pressure-temperature microsensor based on synergistical sensing of dual resonators

Y Lu, Z Yu, B Xie, D Chen, J Wang - Measurement, 2024 - Elsevier
Simultaneous measurements of pressure and temperature take wide attentions for several
technical applications. This pressure–temperature microsensor fully utilizes the mechanical …

An EGaIn-based flexible piezoresistive shear and normal force sensor with hysteresis analysis in normal force direction

X Shi, CH Cheng, Y Zheng… - Journal of Micromechanics …, 2016 - iopscience.iop.org
This paper reports a flexible piezoresistive shear and normal force sensor based on eutectic
gallium–indium (EGaIn) with fabrication and testing results, which includes further study on …

A novel linear capacitive temperature sensor using polydimethylsiloxane

U Salmaz, T Islam, S Sohail - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
A linear, simple, and reliable capacitive temperature sensor is fabricated with inexpensive
materials. The sensor is a parallel plate capacitor, in which the dielectric material …

Magnetically actuated piezoelectric-based rotational energy harvester with enhanced output in wide range of rotating speeds

R Rashidi, N Summerville… - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
This paper reports the design, fabrication, and performance of a novel rotational energy
harvester, utilizing multiple magnetic actuators and piezoelectric beams for the maximum …

A microwave SIW sensor loaded with CSRR for wireless pressure detection in high-temperature environments

H Kou, Q Tan, Y Wang, G Zhang… - Journal of Physics D …, 2019 - iopscience.iop.org
In this study, a microwave substrate integrated waveguide (SIW) sensor loaded with
complementary split ring resonator (CSRR) for wireless pressure detection in high …