A Bendeddouche, R Berjoan,
E Beche… - Journal of Applied …, 1997 - pubs.aip.org
Chemical bonding and local order around the different atoms of thick amorphous SiC x N y
deposits [0.03⩽ x/(x+ y)⩽ 0.67] prepared with chemical vapor deposition at 1000–1200° C …