Data-driven science and technology offer transformative tools and methods to science. This
review article highlights the latest development and progress in the interdisciplinary field of …

Machine learning has had an enormous impact in many scientific disciplines. It has also
attracted significant interest in the field of low-temperature plasma (LTP) modeling and …

Meter-scale of the large area inductively coupled plasma etchers with the capacitive power
coupling are widely applied for the mass production of OLED (organic light emitting diode) …

The production efficiencies of organic light emitting diode (OLED) displays and
semiconductor manufacturing have been dramatically improving with the help of plasma …

This study investigated the effect of plasma charging of the dielectric materials on the
floating sheath distribution. The sheath measurements were conducted with two targets with …

In semiconductor plasma processing, there are huge emerging issues related to the
shrinking critical dimension (CD) and the next generation three-dimensional (3D) device …