Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations

WM Van Spengen - Journal of Micromechanics and …, 2012 - iopscience.iop.org
This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

Research and analysis of MEMS switches in different frequency bands

W Tian, P Li, LX Yuan - Micromachines, 2018 - mdpi.com
Due to their high isolation, low insertion loss, high linearity, and low power consumption,
microelectromechanical systems (MEMS) switches have drawn much attention from …

Ions matter: description of the anomalous electronic behavior in methylammonium lead halide perovskite devices

OS Game, GJ Buchsbaum, Y Zhou… - Advanced Functional …, 2017 - Wiley Online Library
Carrier transport in methylammonium lead iodide (MAPbI3)‐based hybrid organic–inorganic
perovskites (HOIPs) is obscured by vacancy‐mediated ion migration. Thus, the nature of …

Low-voltage high-reliability MEMS switch for millimeter wave 5G applications

S Shekhar, KJ Vinoy… - … of Micromechanics and …, 2018 - iopscience.iop.org
Lack of reliability of radio-frequency microelectromechanical systems (RF MEMS) switches
has inhibited their commercial success. Dielectric stiction/breakdown and mechanical shock …

Review of device and reliability physics of dielectrics in electrostatically driven MEMS devices

WA de Groot, JR Webster, D Felnhofer… - IEEE Transactions on …, 2009 - ieeexplore.ieee.org
After decades of improving semiconductor-device reliability, dielectric failure rates resulting
from surface-charge accumulation, dielectric breakdown, and charge injection have been …

Material dielectricity effects on the performance of capacitive micro-devices: a nonlinear study

S Valizadeh, M Fathalilou, G Rezazadeh - International Journal of …, 2023 - Springer
Nowadays, research on the application of new materials with interesting electrical
properties, such as high dielectric constant, on electrostatically-actuated microstructures has …

On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel …

U Zaghloul, G Papaioannou, B Bhushan… - Microelectronics …, 2011 - Elsevier
This paper reviews the state of the art knowledge related to critical failure mechanisms in
electrostatic micro-and nano-electromechanical systems (MEMS and NEMS) which are the …

Effect of grain boundaries on charge transport in methylammonium lead iodide perovskite thin films

H Khassaf, SK Yadavalli, Y Zhou… - The Journal of …, 2019 - ACS Publications
Methylammonium lead iodide (MAPbI3) has attracted great interest as an organic–inorganic
hybrid perovskite for photovoltaic applications. Vacancy-mediated ion migration is one of the …

The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

CN Arutt, ML Alles, W Liao, H Gong… - Semiconductor …, 2016 - iopscience.iop.org
The potential of micro and nano electromechanical systems (M and NEMS) has expanded
due to advances in materials and fabrication processes. A wide variety of materials are now …

On the influence of environment gases, relative humidity and gas purification on dielectric charging/discharging processes in electrostatically driven MEMS/NEMS …

U Zaghloul, B Bhushan, P Pons… - …, 2010 - iopscience.iop.org
In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …