Roadmap for focused ion beam technologies
The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …
AFM-Based nanofabrication and quality inspection of three-dimensional nanotemplates for soft lithography
Soft lithography is one of the most promising nanofabrication technologies for scalable
nanomanufacturing. It uses flexible molds or stamps to fabricate extremely high-resolution …
nanomanufacturing. It uses flexible molds or stamps to fabricate extremely high-resolution …
[HTML][HTML] The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication
V Deinhart, LM Kern, JN Kirchhof… - Beilstein journal of …, 2021 - beilstein-journals.org
Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial
precision below 5 nm. Achieving such a high patterning precision over large areas and for …
precision below 5 nm. Achieving such a high patterning precision over large areas and for …
A new process chain for producing bulk metallic glass replication masters with micro-and nano-scale features
A novel process chain for serial production of polymer-based devices incorporating both
micro-and nano-scale features is proposed. The process chain is enabled by the use of Zr …
micro-and nano-scale features is proposed. The process chain is enabled by the use of Zr …
Influence of FIB patterning strategies on the shape of 3D structures: comparison of experiments with simulations
M Rommel, JD Jambreck, C Ebm… - Microelectronic …, 2010 - Elsevier
Today's focused ion beam (FIB) systems enable the fast and flexible fabrication of 3D
structures with dimensions well below 100nm. Due to secondary effects like redeposition of …
structures with dimensions well below 100nm. Due to secondary effects like redeposition of …
Inverse modeling of FIB milling by dose profile optimization
S Lindsey, S Waid, G Hobler, HD Wanzenböck… - Nuclear Instruments and …, 2014 - Elsevier
FIB technologies possess a unique ability to form topographies that are difficult or
impossible to generate with binary etching through typical photo-lithography. The ability to …
impossible to generate with binary etching through typical photo-lithography. The ability to …
Technology maturity assessment of micro and nano manufacturing processes and process chains
This article presents a systematic approach for assessing the maturity of manufacturing
technologies. A methodology is proposed that is based on modelling the capability of the …
technologies. A methodology is proposed that is based on modelling the capability of the …
Design and validation of a novel master-making process chain for organic and large area electronics on flexible substrates
This paper presents a novel process chain for fabrication of replication masters for serial
manufacture. The proposed process chain is validated for serial fabrication of (large area) …
manufacture. The proposed process chain is validated for serial fabrication of (large area) …
Process chain for serial manufacture of 3D micro-and nano-scale structures
This paper presents a cost effective route for serial fabrication of 3D structures and the
achievement of function and length scale integration (FLSI) in products. A complex 3D …
achievement of function and length scale integration (FLSI) in products. A complex 3D …
[图书][B] Deterministic fabrication of micro-and nanostructures by focused ion beam
Focused ion beam (FIB) machining is an ideal technique for both micro-and nanofabrication.
This chapter describes a deterministic fabrication approach to accurately obtain micro-and …
This chapter describes a deterministic fabrication approach to accurately obtain micro-and …