L Chen, G Miao, H Xie, W Xiao, G Liu… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
In this report, amorphous Ga2O3 thin film was prepared by magnetron sputtering, and the
Schottky barrier diodes (SBDs) based on amorphous Ga2O3 thin films were fabricated. The …