The article provides a review of the current state of affairs in the field of physics and
technology of multilayer beryllium-containing mirrors intended for projection lithography and …

Progress in the fabrication technology of normal incidence multilayer interference mirrors
permits the traditional optical methods of microscopy, astronomy, and lithography to be …

Multifitting is a computer program designed specifically for modeling the optical properties
(reflection, transmission, absorption) of multilayer films consisting of an arbitrary number of …

High-quality metrology with synchrotron radiation requires in particular a very high spectral
purity of the incident beam. This is usually achieved by a set of transmission filters with …

In this work, the refractive index of beryllium in the photon energy range 20.4–250 eV was
experimentally determined. The initial data include measurements of the transmittance of …

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