With promising applications in broadband communication, terahertz (THz) imaging,
biochemical sensing, nondestructive testing and other fields, THz absorbers have become a …

This paper presents a novel MEMS tunable resonator that draws inspiration from the folded
beam structure in its comb drive resonator design. Conventional electrostatic comb-drive …

This paper describes the design and detailed analysis of a microelectromechanical system
(MEMS) capacitive pressure sensor consisting of nested folded beam suspensions and …

The singularity analysis on the periodic response of a symmetric comb driving and sensing
MEMS gyroscope is carried out in this paper. Considering the nonlinear stiffness of the …

This paper presents an efficient design approach for microelectromechanical systems
(MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator …

The presented paper describes the design, simulation, and analysis of a novel tunable comb-
drive actuator that aims to increase the range of tuning resonance frequency while reducing …

The nonlinear dynamic response of a MEMS resonator with a triangular tuning comb is
studied. The motion equation with dis-smooth tuning electrostatic force is derived according …

The spring constant of the connecting beam is one of the most crucial factors that affect the
detection sensitivity of MEMS sensors. Existing researches reduce the spring constant by …

In this paper, we investigate the bifurcation characteristics of a comb drive MEMS resonator.
The method of averaging and the residue theorem are used to get a more accurate …

Electrostatic actuators have a significant role in Microelectromechanical Systems (MEMS).
Electrostatic comb drive actuator with trapezoidal-shaped geometry is reliable as compared …